Gas permeation properties and preparation of carbon membrane by PECVD method using indene as precursor

College

Gokongwei College of Engineering

Department/Unit

Chemical Engineering

Document Type

Conference Proceeding

Source Title

Journal of Physics: Conference Series

Volume

1295

Issue

1

Publication Date

11-8-2019

Abstract

This work could demonstrate a new approach to the fabrication of gas separation membrane using indene as polymeric precursor for low pressure PECVD system. Membrane characterization was done by taking Scanning Electron Microscopy (SEM) and FTIR measurements. For membrane performance testing, permeability and selectivity of the membrane were evaluated with pure gases of H2, N2, and CO2 using a differential permeation technique. PECVD-derived polyindene membrane showed selectivities of 8.2 and 4.0 for H2/CO2 and H2/N2, respectively, at room temperature. Polyindene (PIn) membrane was successfully fabricated onto a zeolite 5A substrate via radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD) at room temperature. © 2019 Published under licence by IOP Publishing Ltd.

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Digitial Object Identifier (DOI)

10.1088/1742-6596/1295/1/012057

Disciplines

Chemical Engineering

Keywords

Gas separation membranes; Carbon; Indium compounds; Plasma-enhanced chemical vapor deposition; Polycyclic aromatic hydrocarbons; Scanning electron microscopy; Zeolites

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