Spin coated YSZ thin films on silicon substrate
College
College of Science
Department/Unit
Physics
Document Type
Article
Source Title
International Journal of Scientific & Engineering Research
Volume
3
Issue
10
First Page
1
Last Page
7
Publication Date
10-2012
Abstract
Yttria Stabilized Zirconia (YSZ) thin films (<10 μm) were fabricated by spin coating technique on silicon (Si). Parameters such as concentration ratio of YSZ powder to solvent were varied accordingly. The effects of these variations were investigated and discussed. Using X-ray Diffraction and Raman Spectroscopy, the crystal structure of the samples were determined. The 8-YSZ thin films have cubic fluorite structure. The Xray diffraction patterns were in agree
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Recommended Citation
Palisoc, S. T., Tegio, R., Natividad, M. T., Mendiola, S., Tuason, B., Kaw, K. Y., & Tadios, S. (2012). Spin coated YSZ thin films on silicon substrate. International Journal of Scientific & Engineering Research, 3 (10), 1-7. Retrieved from https://animorepository.dlsu.edu.ph/faculty_research/11676
Disciplines
Physics
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